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Glossary

High-NA EUV

A lithography tool whose wider optics print finer circuits in a single pass than standard EUV. It can cut the number of printing passes and so improve both cost and output, but each machine is far more expensive than a standard EUV tool and the process around it has to be re-tuned, which is why Intel, Samsung and TSMC differ on when to adopt it.

Bull 1

Predictions & track record (2)

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