It excites a gas for an instant to emit short-wavelength ultraviolet light. Shorter wavelengths print finer circuits, so the 193nm argon-fluoride excimer laser is the standard source in DUV scanners. At the same frequency, higher power means more wafers processed per hour, so output power translates directly into a tool's productivity.
Bull 1
Predictions & track record (1)
Awaiting gradingWhy did China build a 2008 model when it already held ASML's 7nm scanner?Score at the end of 2027. If deliveries of the domestic immersion scanner stay near the reported 20 units and the generation stays at 1950i class, the author was right, and if a 1980Di-class tool comes out of domestic parts, he was wrong.